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Wafer sorter for 6-8 inch, W-ST-200A

6・8 inch Wafer Sorter W-ST-200A

Wafer sorter for 6 and 8-inch wafers capable of registering up to 8 types of recipes 【Features】 ○ Transfers wafers between wafer cassettes using a 3-axis cylindrical coordinate robot ○ Specifications include 3 cassettes, including one for extraction ○ Slot designation corresponding to numbers is possible ○ Settings for OCR and alignment ON/OFF are available ○ Usable in a clean room environment ● For other functions and details, please download the catalog.

  • Other semiconductor manufacturing equipment

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